摘要
介绍了梯形误差的产生，以及梯形误差的检测方法。根据物镜放大倍率变化与物距的函数关系，推导出梯形误差校正机构的运动距离，并进行了模拟数据的验证。
The generation and the detection method of the trapezoid error are presented in the paper.The moving distance of the trapezoid error correction mechanism is derived according to the functional relation of the objective magnification variations versus the object distance.The demonstration of the simulated data has been carried out.
出处
《光电工程》
EI
CAS
CSCD
1998年第3期18-22,共5页
Opto-Electronic Engineering
基金
国家"八.五"科技攻关项目
关键词
梯形误差
误差修正
放大率
光刻机
Trapezoid errors,Error correction,Magnification,Photolithographic systems
