亚微米电子束曝光机自动输片系统结构与精度分析

Constitution and Accuracy Analysis of Automatic Wafer Transporting System for Sub Micron E Beam Exposure Machine

着重描述了自动输片系统完成的各项功能，并详细介绍机械手的设计功能及精度分析。

Various functions performed by the automatic wafer transporting system are described in particular in the paper.The designed functions and accuracy analysis of the manipulator are introduced in detail.