摘要
报导了采用１．６ｍ直径连续抛光机制造５８６ｍｍ×４４０ｍｍ、２０边形反射面板的大尺寸异型轻质平面反射镜的光学表面抛光技术。讨论了平面连续抛光理论和抛光工艺设备及特点。给出了最终制造结果。
The continuous polishing technology for manufacturing of a large size special shaped lightweight silicon plane mirror (586mm×440mm) by using of a 1.6m diameter continuous polishing machine is reported n the paper.The plane continuous polishing theory,polishing technological equipment and their characteristics are discussed and the results are given.
出处
《光电工程》
CAS
CSCD
1998年第4期41-47,54,共8页
Opto-Electronic Engineering
基金
国家863高技术研究计划
