摘要
A series of Co-doped ZnO thin films have been prepared by direct current reactive magnetron sputtering on glass substrates.The structural characterization by means of X-ray diffraction (XRD) and scanning electron microscopy (SEM) gave no evidence of second phase formation.The qualitative composition and chemical state were characterized by energy dispersive X-ray spectroscopy (EDS) and X-ray photoelectronic spectrometry (XPS),respectively.The results confirmed that Co was incorporated as Co3+,occupying the Zn2+ sites in ZnO's wurtzite structure.The luminescence properties of the films were investigated by room temperature photoluminescence,and the optical properties were studied by optical transmittance.The magnetic analysis was carried out at room temperature and at 50 K by Quantum Design MPMS (SQUID) XL.The results showed that all the Co-doped ZnO thin films prepared by direct current magnetron sputtering were not ferromagnetic above 50 K.
A series of Co-doped ZnO thin films have been prepared by direct current reactive magnetron sputtering on glass substrates. The structural characterization by means of X-ray diffraction （XRD） and scanning electron microscopy （SEM） gave no evidence of second phase formation. The qualitative composition and chemical state were characterized by energy dispersive X-ray spectroscopy （EDS） and X-ray photoelectronic spectrometry （XPS）, respectively. The results confirmed that Co was incorporated as Co^3＋, occupying the Zn^2＋ sites in ZnO＇s wurtzite structure. The luminescence properties of the films were investigated by room temperature photoluminescence, and the optical properties were studied by optical transmittance. The magnetic analysis was carried out at room temperature and at 50 K by Quantum Design MPMS （SQUID） XL. The results showed that all the Co-doped ZnO thin films prepared by direct current magnetron sputtering were not ferromagnetic above 50 K.
基金
supported by the National Natural Science Foundation of China (Grant Nos.60576016,10774013,10804006)
National High-Tech Research and Development Program of China (Grant No.2006AA03Z0412)
111 project (Grant No.B08002)
Fund for the Doctoral Program of Higher Education in China (RFDP) (Grant Nos.20070004024,20070004031)
Beijing Natural Science Foundation of China (BNSFC) (Grant No.1102028)
National Basic Research Program of China (Grant No.2010CB327705)
National Natural Science Funds for Distinguished Young Scholar (Grant No.60825407)
DIF Beijing Jiaotong University (Grant Nos.141028522,141036522)
