摘要
针对求解MEMS挤压膜阻尼过程中存在的问题,采用了多重网格方法进行求解,与传统方法相比,应用于挤压膜中流体问题的求解具有收敛速度快,数值稳定性好的优点,求得了谐振器平板间的压力分布函数以及微谐振器的各个性能指标的值,研究了挤压膜中流体阻尼力的特性以及与谐振器件幅—频特性的关系。
In view of the problems existing in the process of solving squeeze film damping,this paper uses the multigrid method to solve the squeeze film damping of micro-resonator and gets a satisfying result.The multigrid algorithm is considered to have the advantage of rapid convergence and good numerical stability in solving the liquid questions of squeeze film damping.The pressure distribution function between resonator plates and the value of various performance indicators are obtained.The relationships between the frequency and the amplitude,the frequency and the phase as well as the characteristics of damping force are studied.
出处
《机械制造与自动化》
2010年第2期39-42,共4页
Machine Building & Automation
基金
国家自然科学基金(50675034)
江苏省自然科学基金项目(KB2009286)
关键词
微谐振器
挤压膜阻尼
多重网格方法
micro-resonator
squeeze film damping
multigrid method
