真空环境下微流道沟槽的激光铣削试验

Laser Milling of Micro-Fluidic Grooves under Vacuum Condition

采用Nd:YAG激光器,在真空环境下,进行高硬镜面塑胶模具钢(HPM75)的微流道沟槽激光铣削试验研究。研究真空环境下铣削机理及真空度对铣削尺寸和表面质量的影响。研制真空调节系统,调节激光铣削区域状态,进行大气环境和真空环境下的对比试验。结果表明,当真空压力在-0.07～-0.5 MPa范围时,排屑量增加1.6%～3.3%。在铣削优化参数下,与大气环境下激光铣削相比,铣削宽度增加,排屑量增加;可以铣出的沟槽宽度和深度分别为0.225和0.058 mm;真空环境减小了背景气压阻力,提高了熔屑排除力,可以铣削出满足微流道沟槽尺寸和精度要求的沟槽,是一种有效的激光铣削加工辅助工艺。

Laser milling of micro-fluidic Grooves under vacuum condition is presented.The regularity of laser milling under vacuum condition is established according to the analysis of melting-material removal which provides a theoretical basis.Nd：YAG laser is used to mill micro-fluidic grooves of a kind steel of HPM75.The research outcomes show that when vacuum pressure is from -0.07 MPa to -0.5 MPa,the materials removal increases by 1.6%to 3.3%.Vacuum condition means that air pressure is reduced.When the parameters are preferable,the quality of groove is satisfied with width 0.225 mm and depth 0.058 mm,and materials removal increased,compared with common condition.Laser milling rate is higher and its surface quality is proved better than that of normal laser milling.It helps to control the precision of milling size,and it is an effective method to laser milling technology.