集成加热功能双模块湿敏电容衬底材料研究

Study on substrate material of heater integrated polymer humidity capacitance sensor

为实现在高空高湿环境下对湿度的准确测量,研制出一种集成加热功能的湿敏电容,理论分析、计算仿真及试验验证三方面针对这种加热功能湿敏电容的衬底材料进行研究。

In order to realize the accurate humidity measurement in the high moisture environment at high altitude,the humidity capacitance integrated heater on one chip is developed. Through the theory analysis,calculating simulation,and experiment verification,the substrate material of the humidity capacitance with heating function is studied.