摘要
为实现在高空高湿环境下对湿度的准确测量,研制出一种集成加热功能的湿敏电容,理论分析、计算仿真及试验验证三方面针对这种加热功能湿敏电容的衬底材料进行研究。
In order to realize the accurate humidity measurement in the high moisture environment at high altitude,the humidity capacitance integrated heater on one chip is developed. Through the theory analysis,calculating simulation,and experiment verification,the substrate material of the humidity capacitance with heating function is studied.
出处
《信息技术》
2010年第4期33-35,共3页
Information Technology
基金
国家863计划资助项目(2006AA04Z319)
关键词
衬底材料
湿敏电容
加热功能
双模块
substrate material
humidity capacitance
heating function
double modules