一种X光多层膜的设计方法

A design method of X-ray multilayer mirror

为了解决X光多层膜理论设计与实际镀膜反射率不一致的问题,基于物理学关于X光在多层膜界面散射的最新理论,提出一种数学模型,编制了软X光多层膜的设计程序。在考虑界面粗糙度、膜层配比、膜层周期多个实际参数条件影响下,多层膜反射率与入射X光波长的关系曲线。其设计结果与传统的设计方法相比,不但理论先进,能够给出最佳结构参数的设计结果,而且能够给出膜厚误差、配比误差对反射率的影响,同时考虑了多层膜的所有参数,使反射率设计结果更接近于实际镀膜结果。

In order to solve the problem that the theoretical reflectivity of X-ray muhilayer mirror is not in agreement with actual value. According to the latest theory of X-ray diffraction on muhilayer interface, a new mathematical model is presented to design a program for X-ray muhilayer mirror. It can give the curves of the reflectivity versus wavelength by considering the affect of several practical parameters such as the roughness of interface between layers, the ratio of two materials and the period thickness. Compared to the traditional method, the program not only adopts advanced theory to give best designing structure parameters, but also can give the effects brought by the errors of thickness and ratio. Because of these, its results are closer to reality.