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LiNbO_3压电薄膜的研究进展

THE RESEARCH PROGRESS OF LINBO_3 PIEZOELECTRIC THIN FILMS
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摘要 LiNbO3因其优异的压电性能和声表面波特性而被广泛应用于声表面波器件中。对LiNbO3的声表面波特性及薄膜制备技术进行了综述,并着重介绍了LiNbO3/蓝宝石及LiNbO3/金刚石多层结构的制备、声表面波特性的理论研究及压电薄膜研究进展。 LiNbO3 have many applications in SAW devices due to its excellent piezoelectric and surface acoustic wave properties. This paper gives emphasis on the structure, surface acoustic wave properties and fabrication of LiNbO3 thin films. Finally, the research progresses of LiNbO3/sapphire and LiNbO3/diamond structures in the field of surface acoustic wave were reviewed.
作者 王俊喜 董向丹 张丽伟 王新昌
机构地区 郑州大学物理工程学院材料物理教育部重点实验室 新乡学院 浙江大学硅材料国家重点实验室
出处 《真空与低温》 2010年第1期55-60,共6页 Vacuum and Cryogenics
基金 国家自然科学基金(50702051) 硅材料国家重点实验室开放课题(SKL2008-4) 河南省教育厅自然科学研究计划(2008C140001)资助
关键词 LINBO3 压电薄膜 声表面波 LiNbO3 piezoelectric thin films surface acoustic wave
分类号 O484.4 [理学—固体物理]
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参考文献28

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