矩形压电振子式主动阀压电泵的设计及其性能

Design and performance of piezoelectric pump with active valve actuated by rectangular piezoelectric vibrator

根据压电泵的工作原理,基于两端夹持式主动阀开发了矩形压电振子式主动阀压电泵,对其结构及工作原理进行了说明。计算了其理论流量,剖析了流量的影响因素。通过试验研究得出:泵在工作时阀腔压电振子与泵腔压电振子之间的最佳相位差是70°和250°。测试了阀腔压电振子在不同电压、频率驱动信号作用下压电泵的输出特性。同时,对主动阀压电泵的双向泵送能力进行了比较分析。实验结果表明:与正弦波相比,方波作为矩形压电振子主动阀的控制信号时,流量相对比较大。频率为70Hz时,最大流量为140mL/min;在高频情况下,矩形压电双晶片式主动阀压电泵的流量保持较好,圆形压电振子式主动阀压电泵的流量下降明显。

According to the working principle of the piezoelectric pump（PEP）,a PEP with an active valve actuated by a rectangular piezoelecltic vibrator（PEV）was developed based on the initial two-end-clamping active value design,and its structure and working principle were described.The theoretical flow rate of the developed PEP was calculated and its affecting factors were discussed.The test result indicated that the optimal phaseshifts between the PEVs in the valve chamber and the pump chamber are 70 ° and 250 °.The output characteristics of PEP when the PEV in the valve chamber was exeited by drive signals with different voltages and frequencies were measured.The two-way pumping capacity of PEP with active valve was analyzed comparatively.The measuring results showed that the square wave as control signal for the active valve with the rectangular PEV results in flow rate higher than that by sinusoidal wave.The maximal flow rate is 140 mL/min at frequency of 70 Hz.Under the high exciting frequencies,the PEP with active valve using the rectangular bimorph keeps better flow rate capability than that using the circular PEV,the flow rate of which decreases significantly with rise of frequency.