初始溅射粒子密度对烧蚀粒子密度和速度分布的影响

Influence of the initial ablated-particle density on distribution of density and velocity of ablated-particles

采用蒙特-卡罗(Monte Carlo)模拟方法,研究了初始溅射粒子密度对其传输中的密度和速度分布以及环境气体密度分布的影响.结果表明,随着初始溅射粒子密度增大,烧蚀粒子和环境气体高密度峰的交叠区离开靶的最大距离减小,被衬底反弹后,距靶的最小距离减小,烧蚀粒子的速度分布随初始溅射粒子密度增大而变宽,当初始溅射粒子密度大于8.33×1025m-3时,出现速度劈裂现象.所得结论为进一步定量研究纳米晶粒的成核机理提供了基础.

The influence of the density of initial ablated-particle on the spatial density distribution of the particles （Si and He） and the velocity distribution of the Siparticles was investigated via Monte Carlo simulation. With the increase of the initial ablate-particle density,both the maximum distance and the minimum distance after rebound of the mixed region from the target are decreased,and the width of the velocity distribution is increased. The splitting of the velocity was observed when the initial ablated-particle density was greater than 8. 3 × 10^25 m^ -3. These results give a good reference for further study of the Si nanoparticle nucleation.