摘要
我们运用紫外光刻及热熔成形的方法，制作了２０ｍｍ×２０ｍｍ的折射型微透镜阵列，单元微透镜相对口径为Ｆ／２，单元透镜直径９０μｍ，中心间隔１００μｍ．在此基础上进行了电铸和注模复制技术的研究．本文详细讨论了光刻热熔、电铸制模。
We use a new technology of ultraviolet photoetching and melting photoresist to fabricate microlens array.This process was used to get the microlens array, composed of 20×20mm,F/2 microlens with 90μm diameter on 100μm centers. This paper discusses the process conditions of melting photoresist, electroforming and pattern copying in detail.
关键词
微透镜阵列
微光学
光刻胶
电铸
microlens
micro optics
photoresist, electroforming
plastics casting, copying
