多步法误差分离技术在圆度测量中的应用

Application of Multi-step Error Separation Technique to the Roundness Measurement

由 Ｔａｌｙｒｏｎｄ ３型圆度仪、精密分度转台和 ＩＢＭ－ＰＣ微机组成计算机辅助纳米圆度测量系统．采用多步法误差分离技术，将圆度仪的测量精度由原来的 ２５ ｎｍ提高到 ２ｎｍ。文中详细讨论多步法的方法误差、系统误差及其测试结果。该项技术的推广应用对我国现有圆度仪的技术改造具有重要意义。

The computer-aided nanometer roundness measurement system consists of a Talyrond 3 roundness instrument,a precision indexing table and an IBM-PC micro computer. Using multi-step error separation technique, the measurement accuracy of the roundness instrument has been improved from original 25um to 2nm. The method error, system error and its test results are discussed in detail in this paper. The extended application of this technique has great significance for technical reform of our existing roundness instruments.