微流量测量与控制系统

Micro Flow Measuring and Controlling System

本文在一些成功的微流体器件的设计加工基础上,提出了一种计算机控制的微流量测量与控制系统,对各个微机械器件做了介绍,并分析了系统的可行性。

A computer controlled micro flow measuring and controlling system is present on the base of preparing some completed micro flow devices such as micropump and microvalve in this paper. All these micro flow devices are introduced, and the feasibility of this system is analyzed also.