摘要
本文阐述了微型机电系统(MEMS)领域中微泵的几种常见的致动方式及其特点。根据硅微泵的结构特点,制作出用于微型泵的电磁致动器,并对该电磁致动器进行了分析与振动测试。
Several common micro mechanical driving modes as well as their characteristic of micro-pump in MEMS field are described in this paper. A electromagnetic actuator was designed and fabricated to drive silicon micro-pump membrane. Some theoretical analysis and experimental evaluation were made in this paper.
出处
《测试技术学报》
1998年第3期376-381,共6页
Journal of Test and Measurement Technology
