Tc4钛合金上离子束辅助沉积TiC_xN_y膜的微结构与机械性质研究

Studies of the Microstructures and Mechanical Properties of the TiC_xN_y Films on Tc4 Titanium Alloys by Ion Beam Assisted Deposition

利用离子束辅助沉积技术在Tc4钛合金基体上制备了TiCxNy膜。TEM观察揭示膜呈多晶结构，具有（111），（200）和（220）择优取向，AES和XPS分析进一步证实TiCxNy膜呈含氧配置。膜的硬度和摩擦特性与N含量有关，N的含量过高，其硬度与摩擦特性均会下降。在本实验条件下，N离子束的最佳辅助剂量为3×10（17）ions／cm2。干摩擦表明膜的抗氧化性能优良，其存在能有效抑制基体在摩擦过程中形成氧化层。又因腹的硬度高，润滑住良好，显著地改善了基体的磨损特性，特别是粘着磨损特性。

TiCxNy films were grown on the Tc4 titanium alloy substrate by ion beam assisted deposition and studied with TEM,AES and XPS. The TEM results showed that the films have polycrystalline strutures with preferential growth orientations in (111), (200) and (220) directions. The AES and XPS results confirmed that the TiCxNy films contain oxygen coordination. We found that nitrogen content affects the microhardness and friction property of the film; high nitrogen contents may reduce its microhardness and friction coefficient. Under our experimental conditions,the optimized N dose is 3×10(17) ions/cm2. The results of the dry friction test revealed that no oxide layers can form on top of the films, which is resistant to oxidation. The high hardness and excellent lubrication of the film significantly improve the wear properties,especially the adhesive wear resistance of the substrates.