摘要
采用广泛使用的粒子模拟程序MAGIC模拟了以金刚石薄膜作为发射体的真空微电子三极管和四极管的特性，得出了电子运动的轨迹图，从中可以看出上栅极对电子的会聚作用。研究了发射特性与栅极电压、发射体表面积大小等参量的关系，还讨论了电子在阳极、栅极间的分配情况。
The charateristics of both the vacuum micmelectronics triode and the tetrode with planar emit-ters made of diamod films were simulated by the popular particle-in-cell simulation program MAGIC. The elec-tron trajectories were obtained,which showed that electron beams have been focued by the upper gate. The cur-rent distribution in the area between the gates and the anode was also evaluated. The influence of the lower gate voltage and the emitter sizes on the emission characteristics of the devices was also calculated.
出处
《真空科学与技术》
CSCD
北大核心
1998年第5期355-358,共4页
Vacuum Science and Technology
基金
电子科学研究院预研基金
关键词
真空微电子学
场致发射
金刚石
阴极
PIC模拟
Vacuum microclectronics, Field emission array, Particle-in-cell simulate
