摘要
探讨了用硝酸亚铈通过溶胶-凝胶法制备CeO2薄膜的制备工艺。用X射线衍射和扫描电子显微镜分析了薄膜的显微形貌及其晶体结构，借助X射线光电子能谱研究了薄膜表面元素Ce的化学态。结果表明。
The cerium dioxide thin films were prepared by Sol-Gel process from cerium (Ⅲ) nitrate. The topography and crystal structures of the films were studied with X-ray diffraction and scanning electron microscope, respetively.The X-ray photoclectron specroscopic analysis was used to characterize the cerium chemical states at the surface. Our resultS showed that high quality cerium dioxide films can be grown by Sol-Gel process.
出处
《真空科学与技术》
CSCD
北大核心
1998年第4期247-251,共5页
Vacuum Science and Technology
基金
福特-中国研究与发展基金!09415106
关键词
薄膜
溶胶-凝胶法
X射线光电子谱
二氧化铯
Cerium dioxide thin film, Sol-Gel process, X-ray photoelectron spectroscopy
