摘要
用射频磁控溅射法制备了CeO2-x高温氧敏薄膜。通过改变O2／Ar比，制备出不同组分和结构的CeO2-x薄膜。用Ce3d的XPS谱计算了Ce3+的浓度。XRD和AFM分析表明，薄膜经空气中高温退火后，形成了立方体CaF2型小晶粒，晶粒大小明显依赖于退火条件和膜厚。
The CeO2-. films were grown by magnetic sputtering,which can be used to fabricate a new type of high temperature oxygen sensors. The films were studied with XPS, AFM, and XRD. The Ce concentration was evaluated by means of the Ce 3d core levels of the XPS spetra.The results showed that the stoichiometries of the films can be controlled by varying the flow-ratio of argon to oxygen.The XRD and AFM observation revealed that after annealing in air,crystallites were formed with a cubic CaF2 lattice structure,and their grain sizes depend markedly on annealing temperatures and on film thickness.
出处
《真空科学与技术》
CSCD
北大核心
1998年第3期198-201,共4页
Vacuum Science and Technology
基金
福特-中国发展研究基金
