真空漏孔的校准方法

Calibration Methods of Vacuum Leaks

在检漏工作中，要定量地确定被检漏孔的漏率，需要将漏率的量值从气体微流量标准或漏率标准正确地传递到质谱检漏仪。在这个传递过程中，对参考漏孔的校准是一个很重要的环节。以国内外有关的标准和文献为基础，对真空漏孔的常用校准方法──定容变压法、恒压变容法、变容变压法和比较法分别给予分析和介绍。

Vacuum leak standards and leak calibration were reviewed and the conventional vacuum leak calibration techniques were evaluated, which include constant volume method, constant pressure method, △p △V method and compar-ison method.