摘要
氮化硅膜具有对软X射线吸收较小、成膜光滑、强度大和致密性好等优点，因而常选作为窗口材料。本文主要介绍了用于软X射线显微术的氮化硅窗口的制备工艺，给出在国家同步辐射实验室软X射线显微术实验站使用的实验结果。
Silicon nitride film is a good window material for soft X-ray microscopy because of its many favorable properties ,such as low X-ray absorption coefficient ,smooth film surface and fairly dense with high mechanical strength .In this paper, the fabrication of silicon nitride window for soft X-ray microscopy and its field application in National Syn-chrotron Radiation Laboratory of USTC were briefly discussed.
出处
《真空科学与技术》
CSCD
北大核心
1998年第2期151-154,共4页
Vacuum Science and Technology
基金
国家同步辐射实验室开放课题
