Au-Si-Be液态金属离子源发展综述

Review of the Au-Si-Be Liquid Metal Ion Source

对Au－Si－Be液态金属离子源的发展进行了较详细的介绍，包括源的结构、发射特性，以及不同的合金配比、源工作温度、环境气体、系统真空度对源发射稳定性的影响。

In this paper, the latest development of Au-Si-Be liquid metal ion source(LMIS) was reviewed. Various factors related to the souree were discussed in delail, including its configuration, its emission characteristics, and the dependence of ion emission stability on composition, operating temperature, ambient gases and vacuum base pressure.