CO_2激光预处理参数对石英基片表面粗糙度的影响

Effects of CO_2 laser pretreatment parameters on surface roughness of fused silica

为研究CO2激光预处理参数对熔石英基片表面粗糙度的影响,采用频率为100 Hz,光斑面积为1 mm2的CO2激光对理想的熔石英基片进行辐照处理,根据处理后基片表面微观形貌特征将修复程度分别定义为轻度、中度和重度修复,并对3种修复程度下基片的表面粗糙度值进行了统计。研究了不同脉冲作用时间和不同占空比(激光功率)的激光束单点单次辐照基片后的表面粗糙度。结果表明:石英基片的表面粗糙度均方根值和处理造成的凹陷深度均随脉冲作用时间和功率的增加逐渐变大;均方根值的增幅逐渐增加,凹陷深度的增幅逐渐减小。

In order to study the effects of CO2 laser pretreatment parameters on surface roughness of fused silica,the fused silica samples were irradiated by a 100 Hz CO2 laser with a spot size of 1 mm2.Repairing degrees were defined as mild,moderate and severe.Surface roughnesses under different repairing degrees were satistically studied.Besides,surface roughness was investigated for the samples after single shot irradiation by CO2 laser at different pulse durations and duty cycles.The results show that the sample＇s surface roughness and crater depth increase with the increasing duration and duty cycle.The rate of increase rises gradually as the duration increases,while descends gradually as the duty cycle increases.