反式二丁烯和氢气流量比对辉光放电聚合物热稳定性能的影响

Influence of T_2B/H_2 flow ratio on thermal stability of glow discharge polymer prepared by low-pressure plasma chemical vapor deposition

用低压等离子体化学气相沉积法,以T2B和H2为工作气源,改变T2B与H2的流量比例制备了辉光放电聚合物（GDP）涂层。通过GDP碳氢涂层的傅里叶变换红外吸收光谱讨论了流量比例对其内部结构的影响,利用热重曲线表征了GDP碳氢涂层在50-600℃范围内的热失重情况,并且结合其结构讨论了流量比例变化对GDP碳氢涂层的热稳定性的影响,最后探讨了GDP碳氢涂层可能的热裂解过程。结果表明：随着T2B与H2流量比的增大,GDP碳氢涂层中C（sp^2）-Hx/C（sp^3）-Hx含量逐渐降低,-CH3含量增加,碳链逐渐变短而支链含量增加,其热稳定性逐渐变差。以T2B与H2流量比为0.04时,可以成功制备出ICF物理实验所需的靶丸烧蚀层。

The glow discharge polymer（GDP） coating were prepared by low-pressure plasma chemical vapor deposition（LPPCVD） at different T2B/H2 flow ratios varying from 0.04 to 3.00.The hydrogen bonding and microstructure of GDP coatings were studied by Fourier transform infrared absorption spectroscopy.The ratio of C（sp^2）-Hx to C（sp^3）-Hx decreases as the T2B/H2 flow ratio increases.The thermal properties of the coatings were investigated by thermogravimetry at a high purity argon atmosphere.The influence of the T2B/H2 flow ratio on the thermal stability of GDP coatings was discussed.It is found that the thermal stability deteriorates with increasing the T2B/H2 flow ratio.The GDP coatings,prepared at the T2B/H2 flow ratio of 0.04,can serve as the ablation layer of inertical confinement fusion targets.