利用干涉仪检测调整非球面物镜的光路

Adjustment of Optical-path of Aspheric Objective Using Interferometry

介绍了利用干涉仪检测调整非球面物镜光路的方法。调整分粗调和精调两个阶段。在粗调阶段,以激光的光轴作为检测光路的基准光轴,建立起共轴光路检测系统;在精调阶段,以WYGO干涉仪内部倾斜系数作为调整依据,进行物镜的精调。用干涉仪测得的物镜的面形质量为:波前PV值优于λ/8,RMS值达到λ/100(λ=0.6328μm),检测结果满足波前检测镜头的要求。这表明此种光路调整方法能够反映物镜真实的面形精度,并且能用于高精度的物镜检测。

A method for detecting and adjusting the optical path of an aspheric objective by using an interferometer is presented.The adjustment include rough adjustment and accurate adjustment.In the rough adjustment,the optical axis of a laser is used as the reference optical axis and a detection system with a coaxial optical path is established.In the accurate adjustment,the tilt coefficient in a WYGO interferometer is regarded as the adjustment standard and the objective is adjusted accurately. The surface quality of the objective is detected by using the interferometer.The objective has a P-V value better thanλ/8 and a RMS value up toλ/100（λ=0.6328μm） which satisfy the wavefront detection requirement of an objective.The result shows that this optical path adjustment method can reflect the true surface quality of an objective and can be used for the high precision detection of objectives.