Kinetics and Thermodynamics Induced Step-bunching Instability on Semiconductor Surface
Kinetics and Thermodynamics Induced Step-bunching Instability on Semiconductor Surface
摘要
This paper introduces the basic kinetic and thermodynamic factors affecting step-bunching instability and derive the one-dimensional(1D) step motion equation based adatom diffusion equation for further analysis.The step-bunching instability is analyzed for different cases.
This paper introduces the basic kinetic and thermodynamic factors affecting step-bunching instability and derive the one-dimensional（1D） step motion equation based adatom diffusion equation for further analysis. The step-bunching instability is analyzed for different cases.
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