摘要
介绍了可燃气体传感器的发展现状,以及半导体式和催化燃烧式可燃气体传感器的原理、敏感材料、元件结构、制造工艺,展望了可燃气体传感器的发展趋势。
The development situation of combustible gas sensor as well as the mechanism, sensitive material, element structure and fabrication process of semiconductor-type and catalytic combustiontype combustible gas sensor are introduced. The development trend of combustible gas sensor is prospected.
出处
《煤气与热力》
2010年第5期40-42,共3页
Gas & Heat
关键词
可燃气体
报警器
传感器
半导体
气敏元件
combustible gas
alarm
sensor
semiconductor
gas-sensitive element
