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具有并行加工模块的组合设备故障响应策略 被引量：4

Failure response policy for cluster tools with parallel processing module
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摘要 为了有效响应组合设备加工模块常出现的故障,通过分析单臂组合设备的并行模块及其加工流程模式,以及严格的逗留时间约束的晶圆加工过程,建立了Petri网模型,该模型能够描述系统的暂态特性和稳态特性。基于该模型,当并行模块中一个模块出现故障时,分析系统的可调度性,对可调度情况能够提出有效的运行控制策略,使得系统的晶圆不违反逗留时间约束。最后通过实例验证了该控制策略的可行性。 Processing modules in cluster tools were prone to failure and thus it was important to have effective failure response policy.By analyzing single-arm cluster tools with parallel processing module flow pattern and strict wafer residency time constraints,a Petri net model was constructed.This model could not only express the steady state behavior of the system but also the transient behavior.Based on it,schedulability was analyzed whenever any one of the parallel modules for an operation failed.If it was schedulable,effective control policies were presented to keep the system in operation so that no wafer residency time constraint was violated.Examples were presented to show the feasibility of the proposed control policies.
作者 潘春荣 伍乃骐
机构地区 广东工业大学机电工程学院 汕头大学工学院
出处 《计算机集成制造系统》 EI CSCD 北大核心 2010年第4期887-895,共9页 Computer Integrated Manufacturing Systems
基金 国家自然科学基金资助项目(60974098) 广东省科技计划资助项目(2008B010400015) 高等学校博士学科点专项科研基金(20094420110002)~~
关键词 组合设备 故障响应 PETRI网 晶圆制造 cluster tools failure response Petri nets semiconductor fabrication
分类号 TP278 [自动化与计算机技术—检测技术与自动化装置]
  • 相关文献

参考文献16

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二级参考文献44

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共引文献15

同被引文献24

  • 1白丽平,伍乃骐.半导体重入加工过程自动组合装置的建模与分析[J].计算机集成制造系统,2005,11(3):320-325. 被引量：8
  • 2李素粉,朱云龙,尹朝万.具有随机加工时间和机器故障的流水车间调度[J].计算机集成制造系统,2005,11(10):1425-1429. 被引量：13
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引证文献4

二级引证文献21

计算机集成制造系统
2010年 第4期

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