摘要
用二次阳极氧化法在草酸电解液中制备出了高度有序的具有六角形结构的纳米氧化铝阵列模板,采用饱和SnCl4去除铝基体和磷酸去除障碍层后可得到双通的氧化铝模板,通过扫描电子显微镜研究了各参数对模板孔径和厚度的影响因素。文中阐述了试验方法,并由试验结果给出了结论。
High ordered structure nanometer aluminum oxide template was fabricated using oxalic acid solution by two-step anodic oxidation process. It can be seen double-open template after wiping off aluminum and barrier through saturated SnC14 and phosphoric acid respectively. The factor of aperture and thickness of template is studied through scan electron microscopy. The results show： （1）the best polishing current was 80Ma; （2） with increasing of oxidation voltage and time, the aperture of aluminum oxide template was bigger, its inch and distribution can be adjusted by varying oxidation voltage and time; （3） in the processing of wiping off barrier, the aperture can be increased even be penetrated with increasing of dipping time.
出处
《机械管理开发》
2010年第3期60-60,64,共2页
Mechanical Management and Development
关键词
纳米
阳极氧化铝
模板
Nanometer
Anodic aluminum oxide
Template
