纳米级微动平台的结构力学特性及实验研究

Structure Mechanics Characteristics and Experiment of the Micro-motion Stage with Nanometer Resolution

为了实现2维非耦合纳米驱动控制,介绍了一种基于压电陶瓷驱动和柔性筋板导向的一体化新型纳米级微动平台的结构设计.重点介绍了运用解析计算方法对平台结构力学特性的分析研究,得出了该平台导向筋板弱截面处的最大应力以及主体机构的基频值,并通过有限元仿真验证了解析计算结果的正确性.最后,采用显微视觉技术,进行了微动平台动态运动性能的测试实验,给出了平台的动态输入输出特性曲线.

In order to achieve nano-level driving control which is 2-DOF uncoupled,the structure of the nano-level inte-grated micro-motion stage based on oriented slabs and piezoelectric actuators is designed.The structure mechanics charac-teristics of the stage are emphatically studied by analytic calculation.For the stage,the maximum stress of weak section of oriented slab and fundamental frequency of the main-body are obtained.Then the results of analytic calculation are proved by finite element simulation.Finally,the technology of micro-vision is used to test dynamic motion performance of the micro-motion stage.And input-output characteristics curves of the stage are presented.