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基于CDC技术的电容式水平位移传感器 被引量:6

Capacitive horizontal displacement sensor based on CDC technology
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摘要 对矿井井壁变形引起的水平位移进行测量,采用基于电容数字转换器(CDC)技术的芯片AD7745进行电容测量,设计了能够对水平位移进行非接触测量的电容式传感器和测量电极的结构,硬件上采用外壳屏蔽等措施提高抗干扰能力,软件上通过对AD7745内部可编程寄存器的合理设置实现高精度测量。实验结果表明:该传感器在量程为±10mm时,可达到0.1mm的测量精度。 To measure the horizontal displacement caused by the deformation of the mine shaft, a capacitive displacement sensor which can conduct non-contact measurement was designed, by using AD7745, based on CDC technology. The structure of measuring electrode was designed. To improve anti-interference capability, the shell was shielded. High precision measurement was achieved by setting AD7745 internal registers through software design. The experimental results show that the measuring precision can reach 0.1 mm at range of ±10 mm.
出处 《传感器与微系统》 CSCD 北大核心 2010年第5期112-115,共4页 Transducer and Microsystem Technologies
关键词 电容式 水平位移 电容数字转换器 capacitive horizontal displacement capacitance digital converter(CDC)
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