MEMS流体陀螺的研究进展

Research Progress of MEMS Fluid Gyroscope

随着微机电技术(MEMS)的快速发展,惯性器件微陀螺得到了广泛的发展和应用,其中微流体陀螺具有体积小、重量轻、成本低和抗高冲击等独特优点。根据陀螺原理的不同介绍了几种微流体陀螺,包括气体对流微陀螺、射流微陀螺、ECF流体微陀螺和超流体陀螺,气体对流陀螺和射流微陀螺属于常用的典型流体陀螺,而ECF流体陀螺和超流体陀螺属于新型的流体陀螺,分别分析了它们的原理和应用情况,并对它们的应用前景进行了展望,微流体陀螺将在惯性导航和自动控制等方面发挥越来越重要的作用。

micro-gyroscope inertial devices have a wide range of development and application,with the rapid development of technology of micro electro mechanical systems,in which micro-fluid gyroscope with small size,light weight,low cost,high impact resistance and other unique advantages.According to the different principles,several typical micro-fluid gyroscope are introduced,including gas convection micro-gyroscope,jet micro-gyroscope,ECF micro-fluid and super-fluid gyroscope,in which gas convection micro-gyroscope and jet micro-gyroscope are common type fluid gyroscope and ECF micro-fluid and super-fluid gyroscope are new type fluid gyroscope.The theory,application and application prospect are analysed.Micro-fluid gyroscope will play a more and more important role in the areas of inertial navigation,automatic control and some others.