磁控溅射Cd_(1-x)Zn_xTe多晶薄膜组分的可控生长

Composition Controllable Growth of Polycrystal Cd_(1-x)Zn_xTe Films by Magnetron Sputtering

采用双靶位共溅射方法制备出组分可控的Cd1-xZnxTe薄膜样品,组分偏离小于0.13。采用XRD对不同生长温度制备的样品进行了结晶性分析,研究了薄膜结晶与生长温度的关系。采用AFM、SEM对样品进行了表面和界面分析,表明薄膜表面平整,界面清晰。对不同组分的Cd1-xZnxTe样品进行了透射光谱测量,得到了光学性质随组分的变化规律,并拟合得出了这些样品的带隙和组分。

Cd1-xZnxTe films were deposited by dual targets magnetron sputtering co-deposition.The composition error was found to be Δx0.013.The influences of growth temperature on the crystalline characteristics were determined by X-ray diffraction（XRD）.SEM and AFM results show that the films have flat surfaces and clear interfaces.Optical energy gaps of Cd1-xZnxTe films with different x were simulated from the transmittance measurements.