CTAS和CNAS晶体的声表面波特性研究

Study on the Surface Acoustic Wave Properties of CTAS and CNAS Crystals

本文计算了Ca3TaAl3Si2O14(CTAS)和Ca3NbAl3SiO14(CNAS)压电晶体的X,Y和Z切型的声表面波速度、机电耦合系数。计算结果表明:CTAS和CNAS机电耦合系数最高可达1.04%,是石英晶体(最大0.3%)三倍多,而CTAS晶体的声表面波速度(最小值约为3070 m/s)比石英(最小值为3200 m/s)小4.0%。给出声表面波特性比较好的切型,为CTAS和CNAS的声表面波应用提供了理论依据。

The phase velocity and electro-mechanical coupling factor of X,Y and Z cuts of Ca3TaAl3Si2O14（CTAS） and Ca3NbAl3SiO14（CNAS） crystals were calculated in this paper.The results show that the maximum electro-mechanical coupling coefficient of CTAS and CNAS is about 1.04%,which is about three times of that of quartz（maximum 0.3%）.For CTAS crystal,the surface acoustic wave（SAW） velocity has an minimum value of 3070 m/s,which is smaller 4.0% than that of quartz（maximum 3200 m/s）.We gained the cut types with good SAW characteristics,which provides theoretical basis for the SAW application of CTAS and CNAS piezoelectric crystal.