沉积温度对Zn_(0.95)Co_(0.05)O稀磁半导体薄膜结构与磁性的影响

Effect of Deposition Temperature on Structure and Magnetism of Zn_(0.95)Co_(0.05)O DMS Thin Films

本文利用磁控溅射法在Si(100)衬底上制备了Zn0.95Co0.05O薄膜,考察了沉积温度对Zn0.95Co0.05O样品的结构与磁性的影响。采用XRD、FESEM、XPS和SQUID等方法对样品的结构与磁性进行了表征与分析。XRD结果表明:Zn0.95Co0.05O薄膜样品为纤锌矿结构且具有(002)择优生长,不存在Co和其他杂质相。XPS数据证明:薄膜样品中的Co是以Co2+形式存在,并且Co2+占据ZnO晶格中的Zn原子位。磁滞回线表明:Zn0.95Co0.05O薄膜具有明显的室温铁磁性,随着沉积温度的升高,薄膜的铁磁性逐步减弱。

Zn0.95Co0.05O thin films were deposited on Si（100） substrates by RF magnetron sputtering and the effect of deposition temperature on the structure and magnetism of the films was investigated.The structure and magnetism of the films were analyzed by XRD,FESEM,XPS and SQUID.XRD patterns show that all the films with hexagonal wurtzite crystal structures and have highly c-axis orientation.Co cluster and other impurity phase were not observed.XPS spectra reveal that Co cations are in the ＋2 oxidation state and that Co^2＋ is incorporated into the wurtzite lattice at Zn sites.M-H curves indicate that the Zn0.95Co0.05O samples exhibit ferromagnetic behavior.With increasing the deposition temperature,the ferromagnetic properties become weaker.