准高频介质阻挡放电功率及负载等效参数测量

Measurement of Discharge Power and Load Equivalent Parameters of Quasi-high-frequency Dielectric Barrier Discharge

为了解准高频条件下介质阻挡放电特性以及实现等离子体电源与放电管之间的匹配,采用Q-ULissajous图形法研究了外加电压幅值和频率对介质阻挡放电(DBD)的放电功率、等效电容等放电参量的影响。试验结果表明,增大外加电压幅值和工作频率,微放电通道发光强度增强,传输电荷能力增强,放电功率增大;随着外加电压幅值和工作频率的增大,放电管总等效电容C在1.350～1.356nF范围内变化,电介质等效电容Cd增大,放电间隙等效电容Cg减小,直至放电稳定时Cd和Cg分别达到稳定值。

In order to investigate the characteristics of quasi-high-frequency dielectric barrier discharge and realize the impedance matching between plasma power and discharge tube,the effects of applied voltage U and frequency f on discharge power and equivalent capacitances were studied by Q-U Lissajous figures in dielectric barrier discharge （DBD） experiment system. The results show that improving U and f can effectively enhance DBD power P and the luminous intensity of discharge channel. The charge transfer capability is intensified. With U and f increasing,the total equivalent capacitance C changes between 1.350~1.356 nF,and dielectric equivalent capacitance Cd increases. Meanwhile equivalent capacitance of the discharge gap Cg correspondingly decreases. Until the discharge stabilization,Cd and Cg respectively come to stability value.