摘要
讨论了用于高频磁阻抗效应传感技术的ＮｅＦｅ软磁薄膜制备和薄膜单轴各向异性产生方法及机理．用射频磁控溅射法在几十ｋＡ／ｍ磁场定向下制备出具有一定单轴各向异性的Ｎｉ８１Ｆｅ１９软磁薄膜。
NiFe soft magnetic thin films fabricated for high frequency magnetic impedance effect are discussed. The method used to cause uniaxial anisotropy of films is investigated and its mechanism analyzed. When applied several tens kA/m in plane magnetic field along a specific direction, a soft magnetic thin film with uniaxial anisotropy is obtained. A sort of hysteresises of thin films are measured and analyzed.
出处
《华中理工大学学报》
CSCD
北大核心
1999年第1期37-40,共4页
Journal of Huazhong University of Science and Technology
基金
国家自然科学基金
关键词
软磁薄膜
磁控溅射
磁场定向
高频磁阻抗效应
soft magnetic thin film
magnetron sputtering
oriented magnetic field
high frequency magnetic impedance effect
