1HELENE T, PAT S. Mismatch and flicker noise characterization of tantalum nitride thin film resistors for wireless applications [J]. IEEE 2001, 2001, 14(3): 207-213.
2陆锁链,古群.我国电阻器行业运行的基本态势[M].北京:电子工业出版社.2006:56-67.
3SHEN H, RAMANATHAN R. Fabrication of a low resistively tantalum nitride thin flim [J]. Microelectron Eng, 2006(83): 206-211.
4RADMANESH M M.射频与微波电子学[M].顾继慧,李鸣,译.北京:科学出版社,2001:3-10.