飞秒激光加工不锈钢微型悬臂梁的工艺研究

Study on arts and crafts of stainless steel micro-cantilever prepared with femtosecond laser

为了研究飞秒激光对不锈钢材料的加工工艺,采用基于飞秒激光材料烧蚀的微细加工方法,深入研究了飞秒激光高效高质量微细加工不锈钢材料的工艺条件与参量优化,并应用于微型不锈钢悬臂梁的制作。分析了激光能量密度、激光扫描速度、重复扫描次数对加工形貌和蚀除速率的影响,制作出了高质量的微米量级的不锈钢微型悬臂梁。结果表明,飞秒激光微细加工是一种极具前途与极具柔性的微机电系统器件加工手段。

In order to study the arts and crafts of stainless steel prepared with femtosecond laser, the technical condition and parametric optimization were studied in detail and applied in micromaehining the micro-cantilever. The effect of laser fluence, scanning speed and scan times on the morphology of ablated area and ablation rate were analyzed. High quality micro-cantilevers in micrometer level were fabricated. The research shows that femtosecond laser micromachining is a promising and flexible way in micromachining of micro electromechanical devices.