摘要
利用于涉并模抑制和光电信号共模抑制技术，辅以二维扫描平台及计算机控制与数据处理技术，可以高精度地无损测量超光滑表面三维微观轮廓；本文论述了上述测量系统的原理、结构和误差分析，并讨论了三维微观轮廓的定义问题．
By laser interference and electrical common - mode rejection and by the two - dimension scanning and computer,the profile of a super -smooth surface can be detected three dimensionally and non - destructively with vertical resolution better than 0. 1 nano - meter and lateral resolution better than 2μm. In this paper,the principle,structure and error analysis about the profiler is given. The three dimensional profile is elso discussed.
出处
《应用激光》
CSCD
北大核心
1999年第1期25-27,21,共4页
Applied Laser
关键词
三维轮廓
二维扫描
测量
激光双焦干涉
three-dimensional profile
common-mode reject, two-dimensional scanning
