减小列阵光学系统小尺度不均匀性的方法研究

Methods for reducing the small scale non uniformity of optical array systems

应用衍射积分理论，通过详细的数值计算分析，讨论了用于减小列阵光学系统小尺度不均匀性的几种技术方法。所得结果与实验相符，对均匀照明光学系统的设计有参考意义。

Based on the diffraction integral theory and numerical calculations,this paper analyzes the factors of influencing the small scale non uniformity of optical array systems,such as angle error of optical wedge,polarization control and regular phase distribution.The results are consistent with the experiments that the effective method is the proper angle error of optical wedge plus polarization control,and useful for design of optical uniform illumination system.