摘要
应用真空气相化学沉积的工艺方法，在电路板上聚合一层均匀、致密、透明的有机薄膜，并介绍了薄膜的防护性能和介电性能以及在微波电路中的应用情况。
Using the technical method of vacuum chemical vapor deposition,a film with equality,compact and transparece has been polymerized on the PCB.The article describes the protected properties,dielectric properties of the film,and the application to the microwave circuit.
出处
《电子工艺技术》
1999年第2期75-77,共3页
Electronics Process Technology
关键词
敷形涂覆
预聚体
微波集成电路
超薄防护涂层
Vacuum chemical vapor deposition Conformal coatings Prepolymer Chlro-p-xylylene
