相移干涉计量中高精度相移器的研究

Study of a High Precision Phase Shifter Employed in Phase Shifting Metrology

相移器是相移干涉计量中的关键技术，对测量精度有很大的影响，关系到相移技术的成败。介绍了一种闭环控制的高精度相移器，输出电压精度为０．１％，相移器重复误差小于３°，用该相移器的电子散斑干涉计量系统测量精度可达λ／１００。

Phase shifting is the key technique in phase shifting interference metrology and it greatly effects the measuring precision even results in a failure. A high precision phase shifter is presented in this paper. The error of the output voltage is less than 0.1% and the error of the phase shifter is less than 3 degrees. The ESPI measuring system with the phase shifter described in this paper can reach a precision of λ/100.