摘要
相移器是相移干涉计量中的关键技术,对测量精度有很大的影响,关系到相移技术的成败。介绍了一种闭环控制的高精度相移器,输出电压精度为0.1%,相移器重复误差小于3°,用该相移器的电子散斑干涉计量系统测量精度可达λ/100。
Phase shifting is the key technique in phase shifting interference metrology and it greatly effects the measuring precision even results in a failure. A high precision phase shifter is presented in this paper. The error of the output voltage is less than 0.1% and the error of the phase shifter is less than 3 degrees. The ESPI measuring system with the phase shifter described in this paper can reach a precision of λ/100.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1999年第1期21-25,共5页
Chinese Journal of Lasers
关键词
电子散斑
相移器
干涉计量
electronic speckle pattern interferometry (ESPI), phase shifter, interference metrology