激光镜镜面粗糙度的干涉测量

Interference Measurements for Roughness of Laser Mirrors

开发了一种激光镜镜面粗糙度的全场、非接触干涉测量方法。测量了两面不同粗糙度的铜镜，测出的数据和用６ＪＡ型显微干涉轮廓仪测量的结果相吻合。测量的范围为０．０１～０．１２μｍ，理论上测量的精度可达０．００２μｍ。

A full field, noncontacting interference measurement for roughness of laser mirrors has been developed. Suppose the probability density function of the surface height distribution is Gaussian. The relationship between the interference fringes contrast and the ronghness of a mirror is deduced. Two laser mirrors with different roughnesses were measured. The data measured are in agreement with the results measured with a 6JA Microscopic Interference Profilometer. The range of measurement is 0.01 to 0.12 μm and the accuracy of measurement is up to 0.002 μm theoretically. Practically, this work may be useful for controlling the process of mirror polishing.