摘要
本文采用热灯丝化学气相沉积法,以甲烷和氢气为原料气体,在用高温高压法合成的金刚石的(100)面上外延生长出金刚石,在(110)面和(111)面上生长出多晶金刚石微粒。
Diamonds were grown on synthetic diamond substrates froma mixed source material of methane and hydrogen by the hot filament CVDmethod. Eptaxial growth on the (100) face of diamond substrates and po-lycrystalline layer growth on the (111) and (110) faces were observed.
出处
《人工晶体学报》
EI
CAS
CSCD
1990年第2期133-136,共4页
Journal of Synthetic Crystals
关键词
化学气相沉积
人造金刚石
金刚石
synthetic diamond
diamond films, CVD
eptaxial growth
