涡轮分子泵组合叶列几何参数优化设计方法的研究

Research on the Optimized Design Method of the Geometry Specification of the Vane Arrangement of the Turbomolecular Pump

本文在分析了组合叶列内在抽气机理的基础上，以涡轮叶片的基本几何参数：叶片倾角、节弦比为设计变量，以气体连续性方程和最大抽速为约束条件，把压缩比做为目标函数，给出求压缩比极大值的计算方法，本文对涡轮分子泵提高抽气性能、改进结构具有实际意义。

Abstract In this paper, on the analysis of the inner pumping mechanism of the vane arrangement, the basic geometry specifications of the turbo vane e.g dip angle, and gap chord ratio are the variable, the continuous equation and the max. pumping speed are the limited conditions, the compression ratio is taked as the objective function, the calculation method of the max. value of the compression ratio is given, this paper has the practical importance to enhance the pumping performance and to improve the construction of the turbo molecular pump.