多孔阳极氧化铝模板上电子束蒸发沉积TiO_2

Fabrication of TiO_2 Dot-Arrays by Electron Beam Evaporation on Porous Anodic Al Template

以硫酸、草酸溶液为电解液,采用二次阳极氧化法制备了初始孔径在20~120 nm、孔间距在40~250 nm、孔深在200 nm^80μm范围内的具有高度有序纳米孔阵列的多孔阳极氧化铝(porous anodic alumina,PAA)模板。以PAA模板为基片,采用真空电子束蒸发的方法在PAA模板上制备了具有高度有序的TiO2纳米点阵列。利用场发射扫描电子显微镜和原子力显微镜对其形貌进行了表征。研究表明,所形成的TiO2纳米点阵列具有同其基底PAA模板相同的序列结构。对TiO2纳米点阵列的生长形成机理进行了讨论。

The TiO2 nano-dot arrays were deposited by electron beam evaporation on the lab-fabricated porous anodic Al （PAA） templates, with pore sizes of 20- 120nm and an average separation of 40 -250nm. The impacts of the deposi- tion conditions and the microstructures of the PAA templates and the TiO2 nano-dot array were studied. The microstruetures of the TiO2 nano-dot array were characterized with field emission scanning electron microscopy and atomic force mi- croscopy. The results show that the microstructures of the PAA templates significantly affect the configurations of the TiO2 nano-dot array. The possible mechanism responsible for the nano-dot array formation was also tentatively discussed.