多弧离子镀(Ti,Al,Zr)N多元超硬梯度膜的制备及力学性能研究

Growth and Mechanical Properties of Super-Hard Gradient(Ti,Al,Zr) N Coatings by Multi-Arc Ion Plating

采用多弧离子镀技术并使用合金靶Ti-Al-Zr制备(Ti,Al,Zr)N多元超硬梯度膜。利用扫描电镜、X衍射仪对(Ti,Al,Zr)N膜层表面、断面形貌、成分、结构进行观察测定;系统考察了沉积工艺对(Ti,Al,Zr)N膜层质量、膜/基附着力和硬度的影响;并对膜层抗热震性进行了研究。通过与TiN,(Ti,Al)N,(Ti,Zr)N等硬质膜进行比较,发现采用Ti-Al-Zr合金靶制备的(Ti,Al,Zr)N多元梯度膜有更高的硬度和膜/基附着力,硬度可达4000 HV,实现了从硬质膜到超硬膜的转变;膜/基附着力大于200 N,同时对沉积工艺有较强的适应性。

The super hard,composite （Ti,Al,Zr）N coatings were deposited by multi-arc ion plating with the Ti-Al- Zr alloy target on high speed W18Cr4V steel substrates. The impacts of the film deposition conditions, including deposition rate, bias voltage, and nitrogen partial pressure, on its quality were studied. The microstmctures and mechanical properties of the as-deposited （Ti, M, Zr）N coatings were characterized with X-ray diffraction, scanning electron microscopy and conventional mechanical probes. The results show that the gradient （Ti, M, Zr）N coatings deposited with the Ti-M-Zr alloy target have higher micro-hardness, stronger interracial adhesion, and better thermal shock resistance than other hard coatings, such as TiN, （Ti, Zr）N and （Ti, Zr）N thick films. Possible mechanisms were also tentatively discussed.