摘要
Introduction Scaling down to the micro- and nanoscale is a strong current trend in the development of science and technology. ＇Small is energy efficient and cost effective＇ has long been for the motto of the semiconductor industry, including micro- and nanoelectronics, micro-electro-mechanical systems （MEMS） and nanoelectro-mechanical systems （NEMS）.
Introduction Scaling down to the micro- and nanoscale is a strong current trend in the development of science and technology. ＇Small is energy efficient and cost effective＇ has long been for the motto of the semiconductor industry, including micro- and nanoelectronics, micro-electro-mechanical systems （MEMS） and nanoelectro-mechanical systems （NEMS）.
作者
Wanlin Guo(Institute of Nanoscience,Nanjing University of Aeronautics and Astronautics,Nanjing210016, China)Huiming Xie(AML,Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China)Quanshui Zheng(Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China)
