硅基微磁通门非晶Fe_(96)Nb_4铁芯薄膜的研究

Research on Silicon-Based Micro-Fluxgate Amorphous Fe_(96)Nb_4 Core Thin Film

采用磁控溅射法制备一种适合用于硅基微磁通门的新型非晶Fe96Nb4软磁铁芯薄膜,并利用X射线衍射仪、扫描电子显微镜、振动样品磁强计测试薄膜的相组成、表面形貌、和磁滞回线,用双铁芯磁通门探头线圈对制作的铁芯薄膜进行试验。结果表明:随制备温度的升高,薄膜的缺陷明显减小,软磁性能显著改善。基片温度为630K时制作的硅基Fe96Nb4铁芯薄膜的性能适合用于微磁通门铁芯材料。

A new type of amorphous Fe96Nb4 core soft-magnetic thin film suitable for silicon-based micro-fluxgate was prepared by magnetron sputtering technique.Its phase composition,surface morphology and magnetic hysteresis loop were characterized by X-ray diffractometer,SEM and VSM（vibration sample magnetometer）,respectively.The core film was examined by a double-cores fluxgate sensor.The results show that the defects of films decrease when they are prepared at high temperature.Meanwhile,its soft magnetic properties are improved significantly.Silicon-based Fe96Nb4 core thin film prepared at 630 K of the substrate is suitable for the application in the micro-fluxgate iron core materials.